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Surface smoothing of diamond membranes by reactive ion etching process

โœ Scribed by Vivensang, C.; Ferlazzo-Manin, L.; Ravet, M.F.; Turban, G.; Rousseaux, F.; Gicquel, A.


Book ID
123275458
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
490 KB
Volume
5
Category
Article
ISSN
0925-9635

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