Smooth surface glass etching by deep reactive ion etching with SF[sub 6] and Xe gases

✍ Scribed by L. Li; T. Abe; M. Esashi

• Book ID: 121817951
• Publisher: AVS (American Vacuum Society)
• Year: 2003
• Tongue: English
• Weight: 777 KB
• Volume: 21
• Category: Article
• ISSN: 0734-211X
• DOI: 10.1116/1.1624272