Effect of SF 6 flow rate on the etched surface profile and bottom grass formation in deep reactive ion etching process

✍ Scribed by Dixit, Pradeep; Miao, Jianmin

• Book ID: 120430319
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 260 KB
• Volume: 34
• Category: Article
• ISSN: 1742-6588
• DOI: 10.1088/1742-6596/34/1/095