✦ LIBER ✦

Reactive ion etching of diamond and diamond-like carbon films

✍ Scribed by Vivensang, C.; Turban, G.; Anger, E.; Gicquel, A.

Book ID: 121381178
Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 393 KB
Volume: 3
Category: Article
ISSN: 0925-9635
DOI: 10.1016/0925-9635(94)90241-0

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