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Reactive ion etching of diamond using microwave assisted plasmas

✍ Scribed by Silva, F.; Sussmann, R.S.; Bénédic, F.; Gicquel, A.


Book ID
121295026
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
535 KB
Volume
12
Category
Article
ISSN
0925-9635

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