𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Reactive ion etching in the fabrication of niobium tunnel junctions

✍ Scribed by Reible, S.

Book ID
114645183
Publisher
IEEE
Year
1981
Tongue
English
Weight
562 KB
Volume
17
Category
Article
ISSN
0018-9464

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Fabrication of refractive microlenses in
Fabrication of refractive microlenses in semiconductors by mask shape transfer in reactive ion etching
✍ E.M. Strzelecka; G.D. Robinson; L.A. Coldren; E.L. Hu πŸ“‚ Article πŸ“… 1997 πŸ› Elsevier Science 🌐 English βš– 297 KB

Refractive microlenses are formed in semiconductor materials by transfer of a lens-like shape of reflowed erodable polyimide mask into the substrate by reactive ion etching. Simultaneous monitoring of the etch rates of the mask material and the semiconductor results in precise control of the lens ra