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Fabrication of Nb/Al,AlOx/Al/Nb Josephson tunnel junctions using reactive ion etching in SF6

✍ Scribed by D.J. Adelerhof; M.E. Bijlsma; P.B.M. Fransen; T. Weiman; J. Flokstra; H. Rogalla


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
937 KB
Volume
209
Category
Article
ISSN
0921-4534

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Fabrication and properties of vertically
✍ Lucia Capogna; Giovanni Costabile; Paola Barbara; Nadia Martucciello; Roberto Mo πŸ“‚ Article πŸ“… 1994 πŸ› Elsevier Science 🌐 English βš– 588 KB

~Istituto di Cibernetica del C.N.R., 1-80072, Arco Felice (NA), Italy We present three novel processes for the fabrication of two or more vertically stacked Josephson tunnel junctions all based on the Nb/Al -AlOx/Nb technology. The dynamical properties of stacks of up to five, high-quality and low