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Rare-earth oxide thin films for gate dielectrics in microelectronics

✍ Scribed by Markku Leskelä; Kaupo Kukli; Mikko Ritala

Book ID
116600016
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
255 KB
Volume
418
Category
Article
ISSN
0925-8388

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Rare-Earth Oxide Thin Films for Gate Die
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Rare-earth scandate single- and multi-la
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Thin films of rare-earth scandates (REScO 3 ) as well as multi-layers of scandates and titanates have been prepared using pulsed laser deposition. Epitaxial films were grown on SrRuO 3 /SrTiO 3 (100) as well as amorphous films on silicon substrates. The epitaxial films are investigated to measure th