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Thin films of rare-earth metal silicides in microelectronics

✍ Scribed by V.M. Koleshko; V.F. Belitsky; A.A. Khodin

Publisher: Elsevier Science
Year: 1986
Tongue: English
Weight: 656 KB
Volume: 36
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(86)90337-4

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