✦ LIBER ✦
Thin films of rare-earth metal silicides in microelectronics : V. M. Koleshko, V. F. Belitsky and A. A. Khodin. Vacuum36(10), 669 (1986)
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 129 KB
- Volume
- 27
- Category
- Article
- ISSN
- 0026-2714
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