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Rare-Earth Oxide Thin Films for Gate Dielectrics in Microelectronics

โœ Scribed by Markku Leskelae; Kaupo Kukli; Mikko Ritala

Publisher
John Wiley and Sons
Year
2006
Weight
8 KB
Volume
37
Category
Article
ISSN
0931-7597

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โœฆ Synopsis

Abstract

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