✦ LIBER ✦
UV assisted oxidation and nitridation of hafnia based thin films for alternate gate dielectric applications
✍ Scribed by K. Ramani; C.R. Essary; V. Craciun; R.K. Singh
- Publisher
- Elsevier Science
- Year
- 2007
- Tongue
- English
- Weight
- 608 KB
- Volume
- 253
- Category
- Article
- ISSN
- 0169-4332
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