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Rapid thermal annealing of sputtered TiW on GaAs

✍ Scribed by M. Van Hove; M. de Potter; W. De Raedt; G. Zou; M. Meuris; H. Bender; M. Van Rossum

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 35 KB
Volume: 38
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90575-8

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