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Rapid thermal and large area processing of thin films with a line electron beam

✍ Scribed by M. Pauli; G. Dähn; J. Müller; M. Döscher

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 383 KB
Volume: 69
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(93)90541-i

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