Rapid formation of ultra-thin dielectrics by Si surface modification using a large area low energy electron beam

✍ Scribed by Y.C Du; H Wang; B.Z Li; D.C Sun; Z.Q Yu; F.M Li

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 310 KB
• Volume: 41
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)93787-j