✦ LIBER ✦
Rapid formation of ultra-thin dielectrics by Si surface modification using a large area low energy electron beam : Y. C. Du, H. Wang, B. Z. Li, D. C. Sun, Z. Q. Yu and F. M. Li. Vacuum 41(4), 796 (1990)
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 118 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0026-2714
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