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Deposition and Etching of Thin Films by Means of Beam Plasma Discharge with Tube-Like Electron Beam

✍ Scribed by V. M. Atamanov; G. B. Levadny; A. A. Ivanov; S. Klagge; M. Maass; Y. F. Nasedkin; U. V. Sereda; A. A. Serov; N. N. Timchenko

Publisher: John Wiley and Sons
Year: 1982
Tongue: English
Weight: 447 KB
Volume: 22
Category: Article
ISSN: 0005-8025
DOI: 10.1002/ctpp.19820220505

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