Plasma-Beam Discharge with a Pipe-like Electron Beam as the Generator of Large Flows of Active Radicals

✍ Scribed by V. M. Atamanov; G. B. Levadny; A. A. Ivanov; Y. F. Nasedkin; Y. V. Sereda; A. A. Serov; N. N. Timchenko

• Publisher: John Wiley and Sons
• Year: 1982
• Tongue: English
• Weight: 384 KB
• Volume: 22
• Category: Article
• ISSN: 0005-8025
• DOI: 10.1002/ctpp.19820220607