✦ LIBER ✦

Range profiles of 6–10 MeV 15N ions implanted in silicon

✍ Scribed by T. Ahlgren; K. Väkeväinen; J. Räisänen; E. Rauhala; J. Keinonen

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

On the effects of implantation of ions i

✍ L.K. Wang; C.T. Chuang; G.P. Li 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 460 KB

Ranges, straggling and carrier concentra

✍ Wu Yuguang; Zhang Huixing; Zhang Xiaoji; Luo Yan; Zhang Tonghe; Han Zhuen 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 400 KB

SIMS depth profiling of implanted layers

✍ VK Smirnov; SG Simakin 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 279 KB

Measurements of energy-loss distribution

✍ N. Rud; J. Bøttiger; P.S. Jensen 📂 Article 📅 1978 🏛 Elsevier Science ⚖ 489 KB

Range parameters of heavy ions at 10 and

✍ A. Feuerstein; S. Kalbitzer; H. Oetzmann 📂 Article 📅 1975 🏛 Elsevier Science 🌐 English ⚖ 144 KB

2103. Range profiles of 6–16-keV ions im

📂 Article 📅 1976 🏛 Elsevier Science 🌐 English ⚖ 130 KB