Ranges, straggling and carrier concentration profiles of 0.5–6.0 MeV phosphorus in silicon

✍ Scribed by Wu Yuguang; Zhang Huixing; Zhang Xiaoji; Luo Yan; Zhang Tonghe; Han Zhuen

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 400 KB
• Volume: 40
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(90)90100-d