## Abstract BN films deposited from a BF~3~NH~3~ precursor, under chemical vapour infiltration conditions, on plane sintered α‐SiC substrates were analysed by XPS. The films are non‐stoichiometric with an N/B atomic ratio of <1. They also contain significant amounts of oxygen atoms, homogeneously
✦ LIBER ✦
Raman spectroscopy of C-, BN-, SiC-layers deposited on multifilament substrates
✍ Scribed by N. Meyer; K. Nestler; S. Stöckel; G. Marx
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 109 KB
- Volume
- 365
- Category
- Article
- ISSN
- 1618-2650
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