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Characterisation of cubic SiC layers VPE grown on Si substrates of different conductivity

✍ Scribed by C. Frigeri; G. Attolini; M. Bosi; B. E. Watts

Publisher: Springer US
Year: 2008
Tongue: English
Weight: 294 KB
Volume: 19
Category: Article
ISSN: 0957-4522
DOI: 10.1007/s10854-008-9684-3

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