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Raman scattering of polycrystalline 3C–SiC film deposited on AlN buffer layer by using CVD with HMDS

✍ Scribed by Gwiy-Sang Chung; Kang-San Kim


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
200 KB
Volume
39
Category
Article
ISSN
0026-2692

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