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Raman scattering characterization of titanium silicide formation

✍ Scribed by Nemanich, R.J.; Fiordalice, R.W.; Jeon, H.

Book ID
117867530
Publisher
IEEE
Year
1989
Tongue
English
Weight
632 KB
Volume
25
Category
Article
ISSN
0018-9197

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In this article, we report on the laser-induced formation of both C49 and C54 TiSi 2 films with fine grains using Q-switched Nd : YAG laser irradiation from Ti/Si samples. The films formed were characterized with micro-Raman spectroscopy, high-resolution transmission electron microscopy, energy-disp