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Characterization of titanium silicide by Raman spectroscopy for submicron IC processing

✍ Scribed by E.H Lim; G Karunasiri; S.J Chua; Z.X Shen; H Wong; K.L Pey; K.H Lee; L Chan

Book ID: 114155957
Publisher: Elsevier Science
Year: 1998
Tongue: English
Weight: 157 KB
Volume: 43-44
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(98)00234-2

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