𝔖 Bobbio Scriptorium
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Initial formation of titanium silicide

✍ Scribed by Y.U. Idzerda; E.D. Williams; R.L. Park; J. Vähäkangas


Book ID
118986732
Publisher
Elsevier Science
Year
1986
Tongue
English
Weight
446 KB
Volume
177
Category
Article
ISSN
0039-6028

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Laser-induced formation of titanium sili
✍ Chen, S. Y.; Shen, Z. X.; Chen, Z. D.; See, A. K.; Chan, L. H.; Zhang, T. J.; Te 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 194 KB 👁 1 views

In this article, we report on the laser-induced formation of both C49 and C54 TiSi 2 films with fine grains using Q-switched Nd : YAG laser irradiation from Ti/Si samples. The films formed were characterized with micro-Raman spectroscopy, high-resolution transmission electron microscopy, energy-disp