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Raman scattering and photoluminescence from Si nanoparticles in annealed SiO[sub x] thin films

โœ Scribed by Nesheva, D.; Raptis, C.; Perakis, A.; Bineva, I.; Aneva, Z.; Levi, Z.; Alexandrova, S.; Hofmeister, H.


Book ID
120033607
Publisher
American Institute of Physics
Year
2002
Tongue
English
Weight
512 KB
Volume
92
Category
Article
ISSN
0021-8979

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Silicon nanocrystals (nc-Si) embedded in SiO 2 glassy mixture have been prepared on glass substrates and silicon and germanium wafers by r.f. co-sputtering and post-annealing in a vacuum. Using Raman spectrometry, photoluminescence and electrical conductivity measurements, we have investigated the s