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Enhancement of visible photoluminescence in the SiN[sub x] films by SiO[sub 2] buffer and annealing

✍ Scribed by Xu, M.; Xu, S.; Chai, J. W.; Long, J. D.; Ee, Y. C.

Book ID: 120505781
Publisher: American Institute of Physics
Year: 2006
Tongue: English
Weight: 505 KB
Volume: 89
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.2408662

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