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Raman Microprobe Study on Relaxation of Residual Stresses in Patterned Silicon-on-Sapphire

✍ Scribed by Yamazaki, Ken-ichi; Uotani, Ricardo Katsumi; Nambu, Katsumi; Yamada, Masayoshi; Yamamoto, Keiichi; Abe, Kenji

Book ID: 121860563
Publisher: Institute of Pure and Applied Physics
Year: 1984
Tongue: English
Weight: 389 KB
Volume: 23
Category: Article
ISSN: 0021-4922
DOI: 10.1143/JJAP.23.L403

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