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Radiolysis of resist polymers. III. Copolymers of methyl-α-chloroacrylate and trihaloethylmethacrylates

✍ Scribed by Babu, G. N. ;Lu, P. H. ;Hsu, S. L. ;Chien, James C. W.


Book ID
105335105
Publisher
John Wiley and Sons
Year
1984
Weight
665 KB
Volume
22
Category
Article
ISSN
0360-6376

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