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Radiolysis of resist polymers. 2. Poly(haloalkylmethacrylates) and copolymers with methyl methacrylate

✍ Scribed by Babu, G. N.; Narula, A.; Lu, P. H.; Li, X.; Hsu, S. L.; Chien, James C. W.


Book ID
126444852
Publisher
American Chemical Society
Year
1984
Tongue
English
Weight
607 KB
Volume
17
Category
Article
ISSN
0024-9297

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