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Radiolysis of resist polymers. 5. Poly(haloalkyl α-chloroacrylates) and copolymers with methyl methacrylate

✍ Scribed by Babu, G. N.; Chien, James C. W.


Book ID
126158811
Publisher
American Chemical Society
Year
1984
Tongue
English
Weight
451 KB
Volume
17
Category
Article
ISSN
0024-9297

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