✦ LIBER ✦
Electron-sensitive resists. II. Positive resists derived from high polymers of methyl methacrylate, methyl α-chloroacrylate, and hexyl methacrylate
✍ Scribed by Juey H. Lai; Suresh Shrawagi
- Publisher
- John Wiley and Sons
- Year
- 1978
- Tongue
- English
- Weight
- 331 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0021-8995
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