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Radiofrequency power effects on the optical and structural properties of hydrogenated silicon films prepared by radiofrequency magnetron sputtering

✍ Scribed by Bouizem, Y.; Abbes, C.; Kefif, K.; Sib, J.D.; Benlakehal, D.; Kebab, A.; Chahed, L.

Book ID
123315608
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
521 KB
Volume
545
Category
Article
ISSN
0040-6090

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