𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Radiative recombination processes and defects in a-C:H films deposited by PECVD

✍ Scribed by Giorgis, F.; Giuliani, F.; Pirri, C.F.; Tagliaferro, A.; Tresso, E.

Book ID
122581470
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
533 KB
Volume
7
Category
Article
ISSN
0925-9635

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Microstructure and composition of TiC/a-
Microstructure and composition of TiC/a-C:H nanocomposite thin films deposited by a hybrid IPVD/PECVD process
✍ A.A. El Mel; B. Angleraud; E. Gautron; A. Granier; P.Y. Tessier πŸ“‚ Article πŸ“… 2010 πŸ› Elsevier Science 🌐 English βš– 441 KB

Titanium containing amorphous carbon (TiC/a-C:H) films were deposited by a hybrid IPVD/PECVD (Ionized Physical Vapor Deposition/Plasma Enhanced Chemical Vapor Deposition) process combining titanium target magnetron sputtering and PECVD in an Ar-CH 4 plasma. Films with various carbon contents have be