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Characterization of nitrogen-doped a-C:H films deposited by cathodic-arc activated deposition process

✍ Scribed by Chang, Yin-Yu; Wang, Da-Yung; Wu, WeiTe

Book ID: 123001893
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 643 KB
Volume: 12
Category: Article
ISSN: 0925-9635
DOI: 10.1016/S0925-9635(03)00290-5

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