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Characterization of Cr-doped TiO2 thin films prepared by cathodic arc plasma deposition

✍ Scribed by Mu-Hsuan Chan; Wei-Yu Ho; Da-Yung Wang; Fu-Hsing Lu

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
621 KB
Volume
202
Category
Article
ISSN
0257-8972

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✦ Synopsis

Cr-doped TiO 2 thin films were prepared by co-sputtering of titanium and chromium in a cathodic arc plasma evaporation system. X-ray diffraction (XRD), Auger electron spectroscopy (AES), field emission scanning electron microscopy (FE-SEM), and water contact angle measurement were used to characterize obtained films. As-deposited pure titanium dioxide thin films possessed a mostly anatase structure while Cr-doped TiO 2 films was amorphous. After annealing at 450 Β°C for 3 h, amorphous Cr-doped TiO 2 films transformed to a mixed anatase (mostly) and rutile phase. Changes in the morphology and composition of the films were examined by FE-SEM and AES. Crystalline Cr-doped TiO 2 films became super-hydrophilic after 20 min of exposure under visible light illumination, indicating that the absorption edge shifted from an ultraviolet region for TiO 2 to a visible light range for annealed Cr-doped TiO 2 films, which is further confirmed by UV-visible spectra.

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