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Low temperature growth of diamond-like films by cathodic arc plasma deposition

✍ Scribed by Pei-Li Chen; Ming-Yan Tsai; Jiann-Shiun Kao


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
353 KB
Volume
92
Category
Article
ISSN
0169-4332

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Cr-doped TiO 2 thin films were prepared by co-sputtering of titanium and chromium in a cathodic arc plasma evaporation system. X-ray diffraction (XRD), Auger electron spectroscopy (AES), field emission scanning electron microscopy (FE-SEM), and water contact angle measurement were used to characteri