Radiation defects introduced by MeV electrons in argon implanted MOS structures
β Scribed by S. Kaschieva; S. N. Dmitriev
- Publisher
- Springer
- Year
- 2008
- Tongue
- English
- Weight
- 251 KB
- Volume
- 94
- Category
- Article
- ISSN
- 1432-0630
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π SIMILAR VOLUMES
Defects induced by high-energy electrons in Si-SiO 2 structure have been studied by the optically stimulated electron emission (OSEE) method. Si-SiO 2 structures with oxide thickness of 100 nm are irradiated with 23 MeV electrons for different durations. It is shown that most of the defects created
The effect of 12 MeV electron irradiation of p-type Si-SiO 2 structures is studied by Deep Level Transient Spectroscopy (DLTS) measurements. The DLTS spectra of non-irradiated samples exhibit one peak only corresponding to a deep level located in the forbidden gap at 0.56 eV above the valence band e