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Radial plasma flow in a hot anode vacuum arc

โœ Scribed by Beilis, I. I.; Keidar, M.; Boxman, R. L.; Goldsmith, S.; Heberlein, J.; Pfender, E.


Book ID
119995339
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
386 KB
Volume
86
Category
Article
ISSN
0021-8979

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Chromium and titanium film deposition us
โœ I.I. Beilis; A. Shnaiderman; R.L. Boxman ๐Ÿ“‚ Article ๐Ÿ“… 2008 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 480 KB

The radially expanding plasma jet generated in a Hot Refractory Anode Vacuum Arc (HRAVA) was used to deposit thin chromium and titanium films on glass substrates. The arc was sustained between a water-cooled cylindrical cathode and a non-consumed cylindrical tungsten anode separated by a 10 mm gap,