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Quasi-3D microstructure fabrication technique utilizing hard X-ray lithography of synchrotron radiation

✍ Scribed by H. Mekaru; Y. Utsumi; T. Hattori

Book ID: 106184529
Publisher: Springer-Verlag
Year: 2002
Tongue: English
Weight: 185 KB
Volume: 9
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-002-0210-x

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