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Study on fabrication of 3-D microstructures by synchrotron radiation based on pixels exposed lithography

✍ Scribed by Mitsuhiro Horade; Susumu Sugiyama

Book ID: 106185903
Publisher: Springer-Verlag
Year: 2010
Tongue: English
Weight: 845 KB
Volume: 16
Category: Article
ISSN: 0946-7076
DOI: 10.1007/s00542-010-1036-6

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