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Quantitative two-dimensional dopant profile measurement and inverse modeling by scanning capacitance microscopy

✍ Scribed by Huang, Y.; Williams, C. C.; Slinkman, J.

Book ID: 121376824
Publisher: American Institute of Physics
Year: 1995
Tongue: English
Weight: 231 KB
Volume: 66
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.114207

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