Quantitative scanning capacitance microscopy analysis of two-dimensional dopant concentrations at nanoscale dimensions

✍ Scribed by A. Erickson; L. Sadwick; G. Neubauer; J. Kopanski; D. Adderton; M. Rogers

• Book ID: 112820105
• Publisher: Springer US
• Year: 1996
• Tongue: English
• Weight: 564 KB
• Volume: 25
• Category: Article
• ISSN: 0361-5235
• DOI: 10.1007/bf02666260