✦ LIBER ✦

Quantitative secondary ion mass spectrometry analysis of oxygen isotopes and other light elements in silicon oxide films

✍ Scribed by M. Croset; D. Dieumegard

Book ID: 115845913
Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 707 KB
Volume: 16
Category: Article
ISSN: 0010-938X
DOI: 10.1016/0010-938x(76)90004-4

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Quantitative secondary ion mass spectrom

Quantitative secondary ion mass spectrometry analysis of the native oxide on silicon wafers

✍ Yamazaki, Hideyuki; Takahashi, Mamoru 📂 Article 📅 1997 🏛 John Wiley and Sons 🌐 English ⚖ 262 KB 👁 2 views

Quantitative analysis of the native oxide on silicon wafers has been investigated by secondary ion mass spectrometry (SIMS) combined with an encapsulation method. In the encapsulation technique, the sample surface is covered with a thin Ðlm whose material is identical to that of the substrate of the

Quantitative Secondary Ion Mass Spectrom

Quantitative Secondary Ion Mass Spectrometry Analysis of Carbon and Fluorine Impurities on Silicon Wafers Stored in Polymer Carrier Cases

✍ Yamazaki, Hideyuki; Tamaoki, Makiko; Oohashi, Masaya 📂 Article 📅 2000 🏛 Institute of Pure and Applied Physics 🌐 English ⚖ 167 KB

Quantitative determination of oxygen in

Quantitative determination of oxygen in silicon by combination of FTIR-spectroscopy, inert gas fusion analysis and secondary ion mass spectroscopy

✍ G. Stingeder; S. Gara; S. Pahlke; H. Schwenk; E. Guerrero; M. Grasserbauer 📂 Article 📅 1989 🏛 Springer 🌐 English ⚖ 710 KB

Analysis of Structural Distribution of N

Analysis of Structural Distribution of Nitrogen-Incorporated Species at the Interface of Silicon Oxide Films on Silicon Using Time-of-Flight Secondary Ion Mass Spectrometry and Poisson Approximation

✍ Chiba, Kiyoshi 📂 Article 📅 2008 🏛 American Chemical Society 🌐 English ⚖ 200 KB

Incorporation of OH radicals in anodic s

Incorporation of OH radicals in anodic silicon oxide films studied by secondary-ion mass spectroscopy, X-ray photoelectron spectroscopy and ir analysis

✍ I. Montero; L. Galán; E. de la Cal; J.M. Albella; J.C. Pivin 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 357 KB