Quantitative determination of oxygen in silicon by combination of FTIR-spectroscopy, inert gas fusion analysis and secondary ion mass spectroscopy

✍ Scribed by G. Stingeder; S. Gara; S. Pahlke; H. Schwenk; E. Guerrero; M. Grasserbauer

• Book ID: 112376629
• Publisher: Springer
• Year: 1989
• Tongue: English
• Weight: 710 KB
• Volume: 333
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/bf00572379