Analysis of Structural Distribution of Nitrogen-Incorporated Species at the Interface of Silicon Oxide Films on Silicon Using Time-of-Flight Secondary Ion Mass Spectrometry and Poisson Approximation

✍ Scribed by Chiba, Kiyoshi

• Book ID: 126811540
• Publisher: American Chemical Society
• Year: 2008
• Tongue: English
• Weight: 200 KB
• Volume: 80
• Category: Article
• ISSN: 0003-2700
• DOI: 10.1021/ac800675j