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Analysis of intensities of positive and negative ion species from silicon dioxide films using time-of-flight secondary ion mass spectrometry and electronegativity of fragments

✍ Scribed by Kiyoshi Chiba

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 555 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2009.09.085

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