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Characterization of ion species of silicon oxide films using positive and negative secondary ion mass spectra

✍ Scribed by Kiyoshi Chiba; Shun Nakamura

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 298 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.12.118

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