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Quadrupole secondary ion mass spectrometer for simultaneous detection of positive and negative ions

✍ Scribed by S. Daolio; B. Facchin; C. Pagura; A. Tolstogouzov; N. Konenkov

Publisher: John Wiley and Sons
Year: 1999
Tongue: English
Weight: 84 KB
Volume: 13
Category: Article
ISSN: 0951-4198
DOI: 10.1002/(sici)1097-0231(19990515)13:9<782::aid-rcm564>3.0.co;2-l

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✦ Synopsis

The purpose of this study was to design a quadrupole secondary ion mass spectrometer for simultaneous detection of both positive and negative ions of different mass. An original setup based on a quadrupole electrostatic deflector configuration that allows energy and spatial separation of all types of secondary ions was proposed. The device was modeled using the SIMION 3D program before building the prototype. Trajectory and acceptance calculations were provided. Positive and negative secondary ion mass spectra for molybdenum test samples were obtained.

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